Algorithms and Processes in ePLACE

ePLACE does not just fulfill the basic requirements of data preparation, but also provides the most modern technologies available which considerably increase the quality of the exposed patterns.

Modern Fracture Algorithm

The machine format mostly supports only rectangles, triangles, and trapezoids. The desired geometry has to be fractured into such figures. The fracture algorithm used in ePLACE plays a considerable role in the quality of the exposure.

  • Symmetrical fracture into X and Y trapezoids
  • Tool dependent fracture optimization for reduced shot count and write time.
  • Avoidance of sliver effects

Proximity Effect Correction with PROXECCO

A wide range of physical effects occurs during the electron beam exposure. For example, the beam is never perfectly focused. Electrons are scattered back. Chemical and thermal processes are induced in the resist layer on the substrate. The PROXECCO software - embedded in ePLACE - compensates such effects by local adaptation of the electron dose. PROXECCO is licensed by Vistec Electron Beam GmbH ( http://www.vistec-semi.com ).

  • Wide range of proximity functions
  • Optimized fracture into X and Y trapezoids reduces shot number and write time.
  • Line-end shortening correction and contrast enhancement (GIDC)

Patented GIDC Process for Contrast Improvement

With shrinking feature sizes the exposure contrast diminishes with serious consequences for exposure quality and stability. The GIDC technology (Geometrically Induced Dose Correction) increases the contrast such that even smaller structures can be exposed reliably.

  • Fewer defects
  • Lower edge roughness (LER/LWR)
  • Larger process window

Download: GIDC Flyer (PDF)

Physical Exposure Simulation

The defect susceptibility of an exposure can be forecast using physical simulations. This helps to avoid unnecessary exposures. Critical areas can be identified before exposure and adapted if necessary.

  • 2D and 3D visualization of simulation results
  • Forecasting of figure contours with LER/LWR simulation
  • Automatic simulation of thousands of measuring points per script with easy-to-view visualization of results
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