Software Development
- Individual solutions to meet our customers' requirements
- Many years of experience in major software projects
- Extensive expertise in software technologies
- Excellent references
Equipment Control
Reference Projects
Before a company authorizes an external partner such as EQUIcon with the development of a software system which is important to the company, it is necessary to trust the capability and reliability of the partner. We would like to start this process of trust with our good and numerous references. On the other hand, our clients and partners almost always prefer that the solutions we draw up are not made public. For this reason we are only able to demonstrate a small but representative selection of our work.
PCI488-GPIB for OpenVMS
EQUIcon's GPIB implementation is based on the established TNT488 board from National Instruments and guarantees best-possible compatibility to the original IEQ11 and IEZ11 interfaces. PCI488 is currently the most frequently used GPIB interface for OpenVMS in the world.
PCI488 is available for the newest OpenVMS version, both for AXP and also IA64 architecture.
Download: PCI488 Spd 1.9 Product Description (PDF)
Equipment Control
EQUIcon Software GmbH Jena
Konrad-Zuse-Str. 2
07745 Jena
Telephone: +49 3641 6224 0
Fax: +49 3641 6224 11
e-mail:
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ePLACE-Sales
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ePLACE-Support
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niceLAB-Sales
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User-Friendly User Interface
ePLACE depicts the complicated processes of data preparation in the simplest manner possible on the graphic user interface. Even the input is so flexible that even complex tasks can be compiled using the modular principle.
Scalability from Single PC up to Hundreds of CPUs in a Cluster
The client/server architecture enables distribution of compute-intensive tasks across several computers. The ePLACE routines may run in parallel across hundreds of CPUs, or on one single PC as well.
Layout Data Visualization
ePLACE provides many ways for data visualization. This includes display of input data, all intermediate results (including simulations results) right up to the electron beam writer shots.
Supported File Formats
The following file formats are supported by ePLACE:
- OASIS
- GDSII
- DXF
- CIF
Algorithms and Processes in ePLACE
ePLACE does not just fulfill the basic requirements of data preparation, but also provides the most modern technologies available which considerably increase the quality of the exposed patterns.
Modern Fracture Algorithm
The machine format mostly supports only rectangles, triangles, and trapezoids. The desired geometry has to be fractured into such figures. The fracture algorithm used in ePLACE plays a considerable role in the quality of the exposure.
- Symmetrical fracture into X and Y trapezoids
- Tool dependent fracture optimization for reduced shot count and write time.
- Avoidance of sliver effects
Proximity Effect Correction with PROXECCO
A wide range of physical effects occurs during the electron beam exposure. For example, the beam is never perfectly focused. Electrons are scattered back. Chemical and thermal processes are induced in the resist layer on the substrate. The PROXECCO software - embedded in ePLACE - compensates such effects by local adaptation of the electron dose. PROXECCO is licensed by Vistec Electron Beam GmbH ( http://www.vistec-semi.com ).
- Wide range of proximity functions
- Optimized fracture into X and Y trapezoids reduces shot number and write time.
- Line-end shortening correction and contrast enhancement (GIDC)
Patented GIDC Process for Contrast Improvement
With shrinking feature sizes the exposure contrast diminishes with serious consequences for exposure quality and stability. The GIDC technology (Geometrically Induced Dose Correction) increases the contrast such that even smaller structures can be exposed reliably.
- Fewer defects
- Lower edge roughness (LER/LWR)
- Larger process window
Download: GIDC Flyer (PDF)
Physical Exposure Simulation
The defect susceptibility of an exposure can be forecast using physical simulations. This helps to avoid unnecessary exposures. Critical areas can be identified before exposure and adapted if necessary.
- 2D and 3D visualization of simulation results
- Forecasting of figure contours with LER/LWR simulation
- Automatic simulation of thousands of measuring points per script with easy-to-view visualization of results